Nitrogen Trifluoride (NF3) gas dị ọcha
Ozi bụ isi
| CAS | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
Gịnị bụ ihe a?
Nitrogen trifluoride (NF3) bụ gas na-enweghị isi na enweghị isi n'ime ụlọ okpomọkụ yana nrụgide ikuku. Enwere ike ịgbanye ya n'okpuru nrụgide na-agafeghị oke. NF3 kwụsiri ike n'okpuru ọnọdụ nkịtị ọ naghị erekwa ngwa ngwa. Agbanyeghị, ọ nwere ike ire ere mgbe ekpughere ya na oke okpomọkụ ma ọ bụ na ọnụnọ ụfọdụ ihe na-akpata. NF3 nwere oke okpomoku zuru ụwa ọnụ (GWP) mgbe ewepụtara ya na ikuku.
Ebe a ga-eji ihe a?
Ihe na-ehicha ihe na ụlọ ọrụ eletrọnịkị: A na-eji NF3 eme ihe n'ọtụtụ ebe dị ka onye na-ehicha ihe maka iwepụ ihe ndị fọdụrụnụ, dị ka oxides, na elu nke semiconductor, ihe ngosi plasma (PDPs), na ihe ndị ọzọ eletrọnịkị. Ọ nwere ike ihicha elu ndị a nke ọma na-emebighị ha.
Etching gas na mmepụta semiconductor: A na-eji NF3 dị ka gas etching na usoro mmepụta nke semiconductor. Ọ dị irè karịsịa na etching silicon dioxide (SiO2) na silicon nitride (Si3N4), bụ ihe ndị a na-ejikarị eme ihe na-emepụta sekit agbakwunyere.
Mmepụta nke ogige fluorine dị elu: NF3 bụ isi iyi bara uru nke fluorine maka imepụta ogige dị iche iche nwere fluorine. A na-eji ya dị ka ihe mmalite na mmepụta nke fluoropolymers, fluorocarbons, na kemịkal pụrụ iche.
Ọgbọ Plasma n'ichepụta ihe ngosi dị larịị: A na-eji NF3 yana gas ndị ọzọ mepụta plasma na mmepụta nke ngosipụta panel dị larịị, dị ka ngosipụta kristal mmiri (LCD) na PDP. Plasma dị mkpa na ntinye na usoro etching n'oge nrụpụta panel.
Rịba ama na ngwa na ụkpụrụ akọwapụtara maka iji ihe/ngwaahịa a nwere ike ịdị iche site na obodo, ụlọ ọrụ na ebumnuche. Soro ntuziaka nchekwa mgbe niile wee kpọtụrụ ọkachamara tupu iji ihe/ngwaahịa a na ngwa ọ bụla.
Ngwaahịa ndị emetụtara
-
Carbon Tetrafluoride (CF4) gas dị ọcha
-
Sulfur Hexafluoride (SF6) gas dị ọcha
-
Silane (SiH4) Gas dị ọcha
